5/30/2011	8:11:01 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/30/2011	8:11:02 AM	Recipe started at 8:11 AM
5/30/2011	8:11:02 AM	Helium valve closed
5/30/2011	8:11:02 AM	H2 valve closed
5/30/2011	8:11:02 AM	BCl3 valve closed
5/30/2011	8:11:02 AM	PH3 valve closed
5/30/2011	8:11:02 AM	SiCl4 pre valve closed
5/30/2011	8:11:02 AM	SiCl4 post valve closed
5/30/2011	8:11:02 AM	Main Vac valve closed
5/30/2011	8:11:02 AM	Bubbler valve closed
5/30/2011	8:11:02 AM	Bypass valve opened
5/30/2011	8:11:02 AM	Helium MFC set to  0.000000
5/30/2011	8:11:02 AM	H2 MFC set to  0.000000
5/30/2011	8:11:02 AM	BCl3 MFC set to  0.000000
5/30/2011	8:11:02 AM	PHl3 MFC set to  0.000000
5/30/2011	8:11:02 AM	SiCl4 MFC set to  0.000000
5/30/2011	8:11:02 AM	Bypass solenoid MFC set to  0.000000
5/30/2011	8:11:02 AM	Tube furnace set to 0
5/30/2011	8:11:03 AM	Helium valve closed
5/30/2011	8:11:03 AM	H2 valve closed
5/30/2011	8:11:03 AM	BCl3 valve closed
5/30/2011	8:11:03 AM	PH3 valve closed
5/30/2011	8:11:03 AM	SiCl4 pre valve closed
5/30/2011	8:11:03 AM	SiCl4 post valve closed
5/30/2011	8:11:03 AM	Bubbler valve closed
5/30/2011	8:11:03 AM	Main Vac valve opened
5/30/2011	8:11:03 AM	Bypass valve opened
5/30/2011	8:11:03 AM	Helium MFC set to  0.000000
5/30/2011	8:11:03 AM	H2 MFC set to  0.000000
5/30/2011	8:11:03 AM	BCl3 MFC set to  0.000000
5/30/2011	8:11:03 AM	PHl3 MFC set to  0.000000
5/30/2011	8:11:03 AM	SiCl4 MFC set to  0.000000
5/30/2011	8:11:03 AM	Bypass solenoid MFC set to  0.000000
5/30/2011	8:11:03 AM	Tube furnace set to 0
5/30/2011	8:11:03 AM	Run finished at 8:11 AM
5/30/2011	8:11:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/30/2011	8:11:11 AM	Helium MFC set to  100.000000
5/30/2011	8:11:13 AM	Helium valve opened
5/30/2011	8:11:17 AM	Helium MFC set to  0.000000
5/30/2011	8:11:18 AM	Helium valve closed
5/30/2011	8:12:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/30/2011	8:12:00 AM	Recipe started at 8:12 AM
5/30/2011	8:12:00 AM	Helium valve closed
5/30/2011	8:12:00 AM	H2 valve closed
5/30/2011	8:12:00 AM	BCl3 valve closed
5/30/2011	8:12:00 AM	PH3 valve closed
5/30/2011	8:12:00 AM	SiCl4 pre valve closed
5/30/2011	8:12:00 AM	SiCl4 post valve closed
5/30/2011	8:12:00 AM	Main Vac valve closed
5/30/2011	8:12:00 AM	Bypass valve closed
5/30/2011	8:12:00 AM	Bubbler valve closed
5/30/2011	8:12:00 AM	Helium MFC set to  0.000000
5/30/2011	8:12:00 AM	H2 MFC set to  0.000000
5/30/2011	8:12:00 AM	BCl3 MFC set to  0.000000
5/30/2011	8:12:00 AM	PHl3 MFC set to  0.000000
5/30/2011	8:12:00 AM	SiCl4 MFC set to  0.000000
5/30/2011	8:12:00 AM	Bypass solenoid MFC set to  0.000000
5/30/2011	8:12:01 AM	Tube furnace set to 0
5/30/2011	8:12:01 AM	Run finished at 8:12 AM
5/30/2011	8:12:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/30/2011	12:15:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/30/2011	12:15:04 PM	Recipe started at 12:15 PM
5/30/2011	12:15:04 PM	H2 valve closed
5/30/2011	12:15:04 PM	BCl3 valve closed
5/30/2011	12:15:04 PM	PH3 valve closed
5/30/2011	12:15:04 PM	SiCl4 pre valve closed
5/30/2011	12:15:04 PM	SiCl4 post valve closed
5/30/2011	12:15:04 PM	Main Vac valve closed
5/30/2011	12:15:04 PM	Bypass valve closed
5/30/2011	12:15:04 PM	Bubbler valve closed
5/30/2011	12:15:04 PM	Helium valve opened
5/30/2011	12:15:04 PM	Helium MFC set to  500.000000
5/30/2011	12:15:04 PM	H2 MFC set to  0.000000
5/30/2011	12:15:04 PM	BCl3 MFC set to  0.000000
5/30/2011	12:15:04 PM	PHl3 MFC set to  0.000000
5/30/2011	12:15:04 PM	SiCl4 MFC set to  0.000000
5/30/2011	12:15:04 PM	Bypass solenoid MFC set to  0.000000
5/30/2011	12:15:04 PM	Tube furnace set to 0
5/30/2011	12:16:24 PM	Helium valve closed
5/30/2011	12:16:24 PM	H2 valve closed
5/30/2011	12:16:24 PM	BCl3 valve closed
5/30/2011	12:16:24 PM	PH3 valve closed
5/30/2011	12:16:24 PM	SiCl4 pre valve closed
5/30/2011	12:16:24 PM	SiCl4 post valve closed
5/30/2011	12:16:24 PM	Main Vac valve closed
5/30/2011	12:16:24 PM	Bypass valve closed
5/30/2011	12:16:24 PM	Bubbler valve closed
5/30/2011	12:16:24 PM	Helium MFC set to  0.000000
5/30/2011	12:16:24 PM	H2 MFC set to  0.000000
5/30/2011	12:16:24 PM	BCl3 MFC set to  0.000000
5/30/2011	12:16:24 PM	PHl3 MFC set to  0.000000
5/30/2011	12:16:24 PM	SiCl4 MFC set to  0.000000
5/30/2011	12:16:24 PM	Bypass solenoid MFC set to  0.000000
5/30/2011	12:16:25 PM	Tube furnace set to 0
5/30/2011	12:16:25 PM	Run finished at 12:16 PM
5/30/2011	12:16:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/30/2011	12:22:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/30/2011	12:22:38 PM	Recipe started at 12:22 PM
5/30/2011	12:22:38 PM	Helium valve closed
5/30/2011	12:22:38 PM	H2 valve closed
5/30/2011	12:22:38 PM	BCl3 valve closed
5/30/2011	12:22:38 PM	PH3 valve closed
5/30/2011	12:22:38 PM	SiCl4 pre valve closed
5/30/2011	12:22:38 PM	SiCl4 post valve closed
5/30/2011	12:22:38 PM	Main Vac valve closed
5/30/2011	12:22:38 PM	Bubbler valve closed
5/30/2011	12:22:38 PM	Bypass valve opened
5/30/2011	12:22:38 PM	Helium MFC set to  0.000000
5/30/2011	12:22:38 PM	H2 MFC set to  0.000000
5/30/2011	12:22:38 PM	BCl3 MFC set to  0.000000
5/30/2011	12:22:38 PM	PHl3 MFC set to  0.000000
5/30/2011	12:22:38 PM	SiCl4 MFC set to  0.000000
5/30/2011	12:22:38 PM	Bypass solenoid MFC set to  0.000000
5/30/2011	12:22:38 PM	Tube furnace set to 0
5/30/2011	12:23:10 PM	Helium valve closed
5/30/2011	12:23:10 PM	H2 valve closed
5/30/2011	12:23:10 PM	BCl3 valve closed
5/30/2011	12:23:10 PM	PH3 valve closed
5/30/2011	12:23:10 PM	SiCl4 pre valve closed
5/30/2011	12:23:10 PM	SiCl4 post valve closed
5/30/2011	12:23:10 PM	Bubbler valve closed
5/30/2011	12:23:10 PM	Main Vac valve opened
5/30/2011	12:23:10 PM	Bypass valve opened
5/30/2011	12:23:10 PM	Helium MFC set to  0.000000
5/30/2011	12:23:10 PM	H2 MFC set to  0.000000
5/30/2011	12:23:10 PM	BCl3 MFC set to  0.000000
5/30/2011	12:23:10 PM	PHl3 MFC set to  0.000000
5/30/2011	12:23:10 PM	SiCl4 MFC set to  0.000000
5/30/2011	12:23:10 PM	Bypass solenoid MFC set to  0.000000
5/30/2011	12:23:10 PM	Tube furnace set to 0
5/30/2011	12:23:11 PM	Run finished at 12:23 PM
5/30/2011	12:23:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/30/2011	12:27:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/30/2011	12:27:32 PM	Recipe started at 12:27 PM
5/30/2011	12:27:32 PM	H2 valve closed
5/30/2011	12:27:32 PM	BCl3 valve closed
5/30/2011	12:27:32 PM	PH3 valve closed
5/30/2011	12:27:32 PM	SiCl4 pre valve closed
5/30/2011	12:27:32 PM	SiCl4 post valve closed
5/30/2011	12:27:32 PM	Main Vac valve closed
5/30/2011	12:27:32 PM	Bypass valve closed
5/30/2011	12:27:32 PM	Bubbler valve closed
5/30/2011	12:27:32 PM	Helium valve opened
5/30/2011	12:27:32 PM	Helium MFC set to  500.000000
5/30/2011	12:27:32 PM	H2 MFC set to  0.000000
5/30/2011	12:27:32 PM	BCl3 MFC set to  0.000000
5/30/2011	12:27:32 PM	PHl3 MFC set to  0.000000
5/30/2011	12:27:32 PM	SiCl4 MFC set to  0.000000
5/30/2011	12:27:32 PM	Bypass solenoid MFC set to  0.000000
5/30/2011	12:27:32 PM	Tube furnace set to 0
5/30/2011	12:28:53 PM	Helium valve closed
5/30/2011	12:28:53 PM	H2 valve closed
5/30/2011	12:28:53 PM	BCl3 valve closed
5/30/2011	12:28:53 PM	PH3 valve closed
5/30/2011	12:28:53 PM	SiCl4 pre valve closed
5/30/2011	12:28:53 PM	SiCl4 post valve closed
5/30/2011	12:28:53 PM	Main Vac valve closed
5/30/2011	12:28:53 PM	Bypass valve closed
5/30/2011	12:28:53 PM	Bubbler valve closed
5/30/2011	12:28:53 PM	Helium MFC set to  0.000000
5/30/2011	12:28:53 PM	H2 MFC set to  0.000000
5/30/2011	12:28:53 PM	BCl3 MFC set to  0.000000
5/30/2011	12:28:53 PM	PHl3 MFC set to  0.000000
5/30/2011	12:28:53 PM	SiCl4 MFC set to  0.000000
5/30/2011	12:28:53 PM	Bypass solenoid MFC set to  0.000000
5/30/2011	12:28:53 PM	Tube furnace set to 0
5/30/2011	12:28:53 PM	Run finished at 12:28 PM
5/30/2011	12:28:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/30/2011	12:30:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/30/2011	12:30:28 PM	Recipe started at 12:30 PM
5/30/2011	12:30:28 PM	Helium valve closed
5/30/2011	12:30:28 PM	H2 valve closed
5/30/2011	12:30:28 PM	BCl3 valve closed
5/30/2011	12:30:28 PM	PH3 valve closed
5/30/2011	12:30:28 PM	SiCl4 pre valve closed
5/30/2011	12:30:28 PM	SiCl4 post valve closed
5/30/2011	12:30:28 PM	Main Vac valve closed
5/30/2011	12:30:28 PM	Bubbler valve closed
5/30/2011	12:30:28 PM	Bypass valve opened
5/30/2011	12:30:28 PM	Helium MFC set to  0.000000
5/30/2011	12:30:28 PM	H2 MFC set to  0.000000
5/30/2011	12:30:28 PM	BCl3 MFC set to  0.000000
5/30/2011	12:30:28 PM	PHl3 MFC set to  0.000000
5/30/2011	12:30:28 PM	SiCl4 MFC set to  0.000000
5/30/2011	12:30:28 PM	Bypass solenoid MFC set to  0.000000
5/30/2011	12:30:29 PM	Tube furnace set to 0
5/30/2011	12:31:00 PM	Helium valve closed
5/30/2011	12:31:00 PM	H2 valve closed
5/30/2011	12:31:00 PM	BCl3 valve closed
5/30/2011	12:31:00 PM	PH3 valve closed
5/30/2011	12:31:00 PM	SiCl4 pre valve closed
5/30/2011	12:31:00 PM	SiCl4 post valve closed
5/30/2011	12:31:00 PM	Bubbler valve closed
5/30/2011	12:31:00 PM	Main Vac valve opened
5/30/2011	12:31:00 PM	Bypass valve opened
5/30/2011	12:31:00 PM	Helium MFC set to  0.000000
5/30/2011	12:31:00 PM	H2 MFC set to  0.000000
5/30/2011	12:31:00 PM	BCl3 MFC set to  0.000000
5/30/2011	12:31:00 PM	PHl3 MFC set to  0.000000
5/30/2011	12:31:00 PM	SiCl4 MFC set to  0.000000
5/30/2011	12:31:00 PM	Bypass solenoid MFC set to  0.000000
5/30/2011	12:31:01 PM	Tube furnace set to 0
5/30/2011	12:31:01 PM	Run finished at 12:31 PM
5/30/2011	12:31:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/30/2011	12:40:59 PM	Helium MFC set to  20.000000
5/30/2011	12:41:00 PM	Helium valve opened
5/30/2011	1:04:40 PM	Helium valve closed
5/30/2011	1:05:14 PM	Helium valve opened
5/30/2011	1:18:43 PM	Helium valve closed
5/30/2011	1:20:00 PM	Recipe started at 1:19 PM
5/30/2011	1:20:00 PM	Helium valve closed
5/30/2011	1:20:00 PM	BCl3 valve closed
5/30/2011	1:20:00 PM	PH3 valve closed
5/30/2011	1:20:00 PM	SiCl4 pre valve closed
5/30/2011	1:20:00 PM	SiCl4 post valve closed
5/30/2011	1:20:00 PM	Main Vac valve closed
5/30/2011	1:20:00 PM	Bypass valve closed
5/30/2011	1:20:00 PM	Bubbler valve closed
5/30/2011	1:20:00 PM	H2 valve opened
5/30/2011	1:20:00 PM	Helium MFC set to  0.000000
5/30/2011	1:20:00 PM	H2 MFC set to  500.000000
5/30/2011	1:20:00 PM	BCl3 MFC set to  0.000000
5/30/2011	1:20:00 PM	PHl3 MFC set to  0.000000
5/30/2011	1:20:00 PM	SiCl4 MFC set to  0.000000
5/30/2011	1:20:00 PM	Bypass solenoid MFC set to  0.000000
5/30/2011	1:20:00 PM	Tube furnace set to 0
5/30/2011	1:21:23 PM	Helium valve closed
5/30/2011	1:21:23 PM	BCl3 valve closed
5/30/2011	1:21:23 PM	PH3 valve closed
5/30/2011	1:21:23 PM	SiCl4 pre valve closed
5/30/2011	1:21:23 PM	SiCl4 post valve closed
5/30/2011	1:21:23 PM	Main Vac valve closed
5/30/2011	1:21:23 PM	Bypass valve closed
5/30/2011	1:21:23 PM	H2 valve opened
5/30/2011	1:21:23 PM	Bubbler valve opened
5/30/2011	1:21:23 PM	Helium MFC set to  0.000000
5/30/2011	1:21:23 PM	H2 MFC set to  500.000000
5/30/2011	1:21:23 PM	BCl3 MFC set to  0.000000
5/30/2011	1:21:23 PM	PHl3 MFC set to  0.000000
5/30/2011	1:21:23 PM	SiCl4 MFC set to  0.000000
5/30/2011	1:21:23 PM	Bypass solenoid MFC set to  0.000000
5/30/2011	1:21:24 PM	Tube furnace set to 1000
5/30/2011	1:41:24 PM	Helium valve closed
5/30/2011	1:41:24 PM	BCl3 valve closed
5/30/2011	1:41:24 PM	PH3 valve closed
5/30/2011	1:41:24 PM	Main Vac valve closed
5/30/2011	1:41:24 PM	Bypass valve closed
5/30/2011	1:41:24 PM	H2 valve opened
5/30/2011	1:41:24 PM	SiCl4 pre valve opened
5/30/2011	1:41:24 PM	SiCl4 post valve opened
5/30/2011	1:41:24 PM	Bubbler valve opened
5/30/2011	1:41:24 PM	Helium MFC set to  0.000000
5/30/2011	1:41:24 PM	H2 MFC set to  500.000000
5/30/2011	1:41:24 PM	BCl3 MFC set to  0.000000
5/30/2011	1:41:24 PM	PHl3 MFC set to  0.000000
5/30/2011	1:41:24 PM	SiCl4 MFC set to  50.000000
5/30/2011	1:41:24 PM	Bypass solenoid MFC set to  0.000000
5/30/2011	1:41:24 PM	Tube furnace set to 1000
5/30/2011	2:01:24 PM	Helium valve closed
5/30/2011	2:01:24 PM	BCl3 valve closed
5/30/2011	2:01:24 PM	PH3 valve closed
5/30/2011	2:01:24 PM	SiCl4 pre valve closed
5/30/2011	2:01:24 PM	SiCl4 post valve closed
5/30/2011	2:01:24 PM	Main Vac valve closed
5/30/2011	2:01:24 PM	Bypass valve closed
5/30/2011	2:01:24 PM	H2 valve opened
5/30/2011	2:01:24 PM	Bubbler valve opened
5/30/2011	2:01:24 PM	Helium MFC set to  0.000000
5/30/2011	2:01:24 PM	H2 MFC set to  500.000000
5/30/2011	2:01:24 PM	BCl3 MFC set to  0.000000
5/30/2011	2:01:24 PM	PHl3 MFC set to  0.000000
5/30/2011	2:01:24 PM	SiCl4 MFC set to  0.000000
5/30/2011	2:01:24 PM	Bypass solenoid MFC set to  0.000000
5/30/2011	2:01:24 PM	Tube furnace set to 0
5/30/2011	2:19:09 PM	H2 valve closed
5/30/2011	2:19:09 PM	BCl3 valve closed
5/30/2011	2:19:09 PM	PH3 valve closed
5/30/2011	2:19:09 PM	SiCl4 pre valve closed
5/30/2011	2:19:09 PM	SiCl4 post valve closed
5/30/2011	2:19:09 PM	Main Vac valve closed
5/30/2011	2:19:09 PM	Bypass valve closed
5/30/2011	2:19:09 PM	Helium valve opened
5/30/2011	2:19:09 PM	Bubbler valve opened
5/30/2011	2:19:09 PM	Helium MFC set to  500.000000
5/30/2011	2:19:09 PM	H2 MFC set to  0.000000
5/30/2011	2:19:09 PM	BCl3 MFC set to  0.000000
5/30/2011	2:19:09 PM	PHl3 MFC set to  0.000000
5/30/2011	2:19:09 PM	SiCl4 MFC set to  0.000000
5/30/2011	2:19:09 PM	Bypass solenoid MFC set to  0.000000
5/30/2011	2:19:09 PM	Tube furnace set to 0
5/30/2011	2:40:21 PM	Helium valve closed
5/30/2011	2:40:21 PM	H2 valve closed
5/30/2011	2:40:21 PM	BCl3 valve closed
5/30/2011	2:40:21 PM	PH3 valve closed
5/30/2011	2:40:21 PM	SiCl4 pre valve closed
5/30/2011	2:40:21 PM	SiCl4 post valve closed
5/30/2011	2:40:21 PM	Main Vac valve closed
5/30/2011	2:40:21 PM	Bypass valve closed
5/30/2011	2:40:21 PM	Bubbler valve closed
5/30/2011	2:40:21 PM	Helium MFC set to  0.000000
5/30/2011	2:40:21 PM	H2 MFC set to  0.000000
5/30/2011	2:40:21 PM	BCl3 MFC set to  0.000000
5/30/2011	2:40:21 PM	PHl3 MFC set to  0.000000
5/30/2011	2:40:21 PM	SiCl4 MFC set to  0.000000
5/30/2011	2:40:21 PM	Bypass solenoid MFC set to  0.000000
5/30/2011	2:40:21 PM	Tube furnace set to 0
5/30/2011	2:40:22 PM	Run finished at 2:40 PM
5/30/2011	2:44:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/30/2011	2:44:28 PM	Recipe started at 2:44 PM
5/30/2011	2:44:28 PM	Helium valve closed
5/30/2011	2:44:28 PM	H2 valve closed
5/30/2011	2:44:28 PM	BCl3 valve closed
5/30/2011	2:44:28 PM	PH3 valve closed
5/30/2011	2:44:28 PM	SiCl4 pre valve closed
5/30/2011	2:44:28 PM	SiCl4 post valve closed
5/30/2011	2:44:28 PM	Main Vac valve closed
5/30/2011	2:44:28 PM	Bubbler valve closed
5/30/2011	2:44:28 PM	Bypass valve opened
5/30/2011	2:44:28 PM	Helium MFC set to  0.000000
5/30/2011	2:44:28 PM	H2 MFC set to  0.000000
5/30/2011	2:44:28 PM	BCl3 MFC set to  0.000000
5/30/2011	2:44:28 PM	PHl3 MFC set to  0.000000
5/30/2011	2:44:28 PM	SiCl4 MFC set to  0.000000
5/30/2011	2:44:28 PM	Bypass solenoid MFC set to  0.000000
5/30/2011	2:44:28 PM	Tube furnace set to 0
5/30/2011	2:45:01 PM	Helium valve closed
5/30/2011	2:45:01 PM	H2 valve closed
5/30/2011	2:45:01 PM	BCl3 valve closed
5/30/2011	2:45:01 PM	PH3 valve closed
5/30/2011	2:45:01 PM	SiCl4 pre valve closed
5/30/2011	2:45:01 PM	SiCl4 post valve closed
5/30/2011	2:45:01 PM	Bubbler valve closed
5/30/2011	2:45:01 PM	Main Vac valve opened
5/30/2011	2:45:01 PM	Bypass valve opened
5/30/2011	2:45:01 PM	Helium MFC set to  0.000000
5/30/2011	2:45:01 PM	H2 MFC set to  0.000000
5/30/2011	2:45:01 PM	BCl3 MFC set to  0.000000
5/30/2011	2:45:01 PM	PHl3 MFC set to  0.000000
5/30/2011	2:45:01 PM	SiCl4 MFC set to  0.000000
5/30/2011	2:45:01 PM	Bypass solenoid MFC set to  0.000000
5/30/2011	2:45:01 PM	Tube furnace set to 0
5/30/2011	2:45:02 PM	Run finished at 2:45 PM
5/30/2011	2:45:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/30/2011	2:46:54 PM	Helium MFC set to  10.000000
5/30/2011	2:46:59 PM	Helium valve opened
5/30/2011	3:27:17 PM	Helium valve closed
5/30/2011	3:28:02 PM	Helium valve opened
5/30/2011	3:46:55 PM	Helium valve closed
5/30/2011	3:47:34 PM	Recipe started at 3:47 PM
5/30/2011	3:47:34 PM	Helium valve closed
5/30/2011	3:47:34 PM	BCl3 valve closed
5/30/2011	3:47:34 PM	PH3 valve closed
5/30/2011	3:47:34 PM	SiCl4 pre valve closed
5/30/2011	3:47:34 PM	SiCl4 post valve closed
5/30/2011	3:47:34 PM	Main Vac valve closed
5/30/2011	3:47:34 PM	Bypass valve closed
5/30/2011	3:47:34 PM	Bubbler valve closed
5/30/2011	3:47:34 PM	H2 valve opened
5/30/2011	3:47:34 PM	Helium MFC set to  0.000000
5/30/2011	3:47:34 PM	H2 MFC set to  500.000000
5/30/2011	3:47:34 PM	BCl3 MFC set to  0.000000
5/30/2011	3:47:34 PM	PHl3 MFC set to  0.000000
5/30/2011	3:47:34 PM	SiCl4 MFC set to  0.000000
5/30/2011	3:47:34 PM	Bypass solenoid MFC set to  0.000000
5/30/2011	3:47:34 PM	Tube furnace set to 0
5/30/2011	3:48:56 PM	Helium valve closed
5/30/2011	3:48:56 PM	BCl3 valve closed
5/30/2011	3:48:56 PM	PH3 valve closed
5/30/2011	3:48:56 PM	SiCl4 pre valve closed
5/30/2011	3:48:56 PM	SiCl4 post valve closed
5/30/2011	3:48:56 PM	Main Vac valve closed
5/30/2011	3:48:56 PM	Bypass valve closed
5/30/2011	3:48:56 PM	H2 valve opened
5/30/2011	3:48:56 PM	Bubbler valve opened
5/30/2011	3:48:56 PM	Helium MFC set to  0.000000
5/30/2011	3:48:56 PM	H2 MFC set to  500.000000
5/30/2011	3:48:56 PM	BCl3 MFC set to  0.000000
5/30/2011	3:48:56 PM	PHl3 MFC set to  0.000000
5/30/2011	3:48:56 PM	SiCl4 MFC set to  0.000000
5/30/2011	3:48:56 PM	Bypass solenoid MFC set to  0.000000
5/30/2011	3:48:56 PM	Tube furnace set to 1000
5/30/2011	4:08:56 PM	Helium valve closed
5/30/2011	4:08:56 PM	BCl3 valve closed
5/30/2011	4:08:56 PM	PH3 valve closed
5/30/2011	4:08:56 PM	Main Vac valve closed
5/30/2011	4:08:56 PM	Bypass valve closed
5/30/2011	4:08:56 PM	H2 valve opened
5/30/2011	4:08:56 PM	SiCl4 pre valve opened
5/30/2011	4:08:56 PM	SiCl4 post valve opened
5/30/2011	4:08:56 PM	Bubbler valve opened
5/30/2011	4:08:56 PM	Helium MFC set to  0.000000
5/30/2011	4:08:56 PM	H2 MFC set to  500.000000
5/30/2011	4:08:56 PM	BCl3 MFC set to  0.000000
5/30/2011	4:08:56 PM	PHl3 MFC set to  0.000000
5/30/2011	4:08:56 PM	SiCl4 MFC set to  50.000000
5/30/2011	4:08:56 PM	Bypass solenoid MFC set to  0.000000
5/30/2011	4:08:57 PM	Tube furnace set to 1000
5/30/2011	4:28:57 PM	Helium valve closed
5/30/2011	4:28:57 PM	BCl3 valve closed
5/30/2011	4:28:57 PM	PH3 valve closed
5/30/2011	4:28:57 PM	SiCl4 pre valve closed
5/30/2011	4:28:57 PM	SiCl4 post valve closed
5/30/2011	4:28:57 PM	Main Vac valve closed
5/30/2011	4:28:57 PM	Bypass valve closed
5/30/2011	4:28:57 PM	H2 valve opened
5/30/2011	4:28:57 PM	Bubbler valve opened
5/30/2011	4:28:57 PM	Helium MFC set to  0.000000
5/30/2011	4:28:57 PM	H2 MFC set to  500.000000
5/30/2011	4:28:57 PM	BCl3 MFC set to  0.000000
5/30/2011	4:28:57 PM	PHl3 MFC set to  0.000000
5/30/2011	4:28:57 PM	SiCl4 MFC set to  0.000000
5/30/2011	4:28:57 PM	Bypass solenoid MFC set to  0.000000
5/30/2011	4:28:57 PM	Tube furnace set to 0
5/30/2011	4:39:14 PM	H2 valve closed
5/30/2011	4:39:14 PM	BCl3 valve closed
5/30/2011	4:39:14 PM	PH3 valve closed
5/30/2011	4:39:14 PM	SiCl4 pre valve closed
5/30/2011	4:39:14 PM	SiCl4 post valve closed
5/30/2011	4:39:14 PM	Main Vac valve closed
5/30/2011	4:39:14 PM	Bypass valve closed
5/30/2011	4:39:14 PM	Helium valve opened
5/30/2011	4:39:14 PM	Bubbler valve opened
5/30/2011	4:39:14 PM	Helium MFC set to  500.000000
5/30/2011	4:39:14 PM	H2 MFC set to  0.000000
5/30/2011	4:39:14 PM	BCl3 MFC set to  0.000000
5/30/2011	4:39:14 PM	PHl3 MFC set to  0.000000
5/30/2011	4:39:14 PM	SiCl4 MFC set to  0.000000
5/30/2011	4:39:14 PM	Bypass solenoid MFC set to  0.000000
5/30/2011	4:39:14 PM	Tube furnace set to 0
5/30/2011	5:12:34 PM	Helium valve closed
5/30/2011	5:12:34 PM	H2 valve closed
5/30/2011	5:12:34 PM	BCl3 valve closed
5/30/2011	5:12:34 PM	PH3 valve closed
5/30/2011	5:12:34 PM	SiCl4 pre valve closed
5/30/2011	5:12:34 PM	SiCl4 post valve closed
5/30/2011	5:12:34 PM	Main Vac valve closed
5/30/2011	5:12:34 PM	Bypass valve closed
5/30/2011	5:12:34 PM	Bubbler valve closed
5/30/2011	5:12:34 PM	Helium MFC set to  0.000000
5/30/2011	5:12:34 PM	H2 MFC set to  0.000000
5/30/2011	5:12:34 PM	BCl3 MFC set to  0.000000
5/30/2011	5:12:34 PM	PHl3 MFC set to  0.000000
5/30/2011	5:12:34 PM	SiCl4 MFC set to  0.000000
5/30/2011	5:12:34 PM	Bypass solenoid MFC set to  0.000000
5/30/2011	5:12:35 PM	Tube furnace set to 0
5/30/2011	5:12:35 PM	Run finished at 5:12 PM
5/30/2011	5:25:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/30/2011	5:25:01 PM	Recipe started at 5:25 PM
5/30/2011	5:25:01 PM	Helium valve closed
5/30/2011	5:25:01 PM	H2 valve closed
5/30/2011	5:25:01 PM	BCl3 valve closed
5/30/2011	5:25:01 PM	PH3 valve closed
5/30/2011	5:25:01 PM	SiCl4 pre valve closed
5/30/2011	5:25:01 PM	SiCl4 post valve closed
5/30/2011	5:25:01 PM	Main Vac valve closed
5/30/2011	5:25:01 PM	Bubbler valve closed
5/30/2011	5:25:01 PM	Bypass valve opened
5/30/2011	5:25:01 PM	Helium MFC set to  0.000000
5/30/2011	5:25:01 PM	H2 MFC set to  0.000000
5/30/2011	5:25:01 PM	BCl3 MFC set to  0.000000
5/30/2011	5:25:01 PM	PHl3 MFC set to  0.000000
5/30/2011	5:25:01 PM	SiCl4 MFC set to  0.000000
5/30/2011	5:25:01 PM	Bypass solenoid MFC set to  0.000000
5/30/2011	5:25:01 PM	Tube furnace set to 0
5/30/2011	5:25:34 PM	Helium valve closed
5/30/2011	5:25:34 PM	H2 valve closed
5/30/2011	5:25:34 PM	BCl3 valve closed
5/30/2011	5:25:34 PM	PH3 valve closed
5/30/2011	5:25:34 PM	SiCl4 pre valve closed
5/30/2011	5:25:34 PM	SiCl4 post valve closed
5/30/2011	5:25:34 PM	Bubbler valve closed
5/30/2011	5:25:34 PM	Main Vac valve opened
5/30/2011	5:25:34 PM	Bypass valve opened
5/30/2011	5:25:34 PM	Helium MFC set to  0.000000
5/30/2011	5:25:34 PM	H2 MFC set to  0.000000
5/30/2011	5:25:34 PM	BCl3 MFC set to  0.000000
5/30/2011	5:25:34 PM	PHl3 MFC set to  0.000000
5/30/2011	5:25:34 PM	SiCl4 MFC set to  0.000000
5/30/2011	5:25:34 PM	Bypass solenoid MFC set to  0.000000
5/30/2011	5:25:35 PM	Tube furnace set to 0
5/30/2011	5:25:35 PM	Run finished at 5:25 PM
5/30/2011	5:25:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/30/2011	10:12:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/30/2011	10:12:37 PM	Recipe started at 10:12 PM
5/30/2011	10:12:37 PM	H2 valve closed
5/30/2011	10:12:37 PM	BCl3 valve closed
5/30/2011	10:12:37 PM	PH3 valve closed
5/30/2011	10:12:37 PM	SiCl4 pre valve closed
5/30/2011	10:12:37 PM	SiCl4 post valve closed
5/30/2011	10:12:37 PM	Main Vac valve closed
5/30/2011	10:12:37 PM	Bypass valve closed
5/30/2011	10:12:37 PM	Bubbler valve closed
5/30/2011	10:12:37 PM	Helium valve opened
5/30/2011	10:12:37 PM	Helium MFC set to  500.000000
5/30/2011	10:12:37 PM	H2 MFC set to  0.000000
5/30/2011	10:12:37 PM	BCl3 MFC set to  0.000000
5/30/2011	10:12:37 PM	PHl3 MFC set to  0.000000
5/30/2011	10:12:37 PM	SiCl4 MFC set to  0.000000
5/30/2011	10:12:37 PM	Bypass solenoid MFC set to  0.000000
5/30/2011	10:12:38 PM	Tube furnace set to 0
5/30/2011	10:13:58 PM	Helium valve closed
5/30/2011	10:13:58 PM	H2 valve closed
5/30/2011	10:13:58 PM	BCl3 valve closed
5/30/2011	10:13:58 PM	PH3 valve closed
5/30/2011	10:13:58 PM	SiCl4 pre valve closed
5/30/2011	10:13:58 PM	SiCl4 post valve closed
5/30/2011	10:13:58 PM	Main Vac valve closed
5/30/2011	10:13:58 PM	Bypass valve closed
5/30/2011	10:13:58 PM	Bubbler valve closed
5/30/2011	10:13:58 PM	Helium MFC set to  0.000000
5/30/2011	10:13:58 PM	H2 MFC set to  0.000000
5/30/2011	10:13:58 PM	BCl3 MFC set to  0.000000
5/30/2011	10:13:58 PM	PHl3 MFC set to  0.000000
5/30/2011	10:13:58 PM	SiCl4 MFC set to  0.000000
5/30/2011	10:13:58 PM	Bypass solenoid MFC set to  0.000000
5/30/2011	10:13:58 PM	Tube furnace set to 0
5/30/2011	10:13:58 PM	Run finished at 10:13 PM
5/30/2011	10:13:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/30/2011	10:19:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/30/2011	10:19:06 PM	Recipe started at 10:19 PM
5/30/2011	10:19:06 PM	Helium valve closed
5/30/2011	10:19:06 PM	H2 valve closed
5/30/2011	10:19:06 PM	BCl3 valve closed
5/30/2011	10:19:06 PM	PH3 valve closed
5/30/2011	10:19:06 PM	SiCl4 pre valve closed
5/30/2011	10:19:06 PM	SiCl4 post valve closed
5/30/2011	10:19:06 PM	Main Vac valve closed
5/30/2011	10:19:06 PM	Bubbler valve closed
5/30/2011	10:19:06 PM	Bypass valve opened
5/30/2011	10:19:06 PM	Helium MFC set to  0.000000
5/30/2011	10:19:06 PM	H2 MFC set to  0.000000
5/30/2011	10:19:06 PM	BCl3 MFC set to  0.000000
5/30/2011	10:19:06 PM	PHl3 MFC set to  0.000000
5/30/2011	10:19:06 PM	SiCl4 MFC set to  0.000000
5/30/2011	10:19:06 PM	Bypass solenoid MFC set to  0.000000
5/30/2011	10:19:07 PM	Tube furnace set to 0
5/30/2011	10:19:38 PM	Helium valve closed
5/30/2011	10:19:38 PM	H2 valve closed
5/30/2011	10:19:38 PM	BCl3 valve closed
5/30/2011	10:19:38 PM	PH3 valve closed
5/30/2011	10:19:38 PM	SiCl4 pre valve closed
5/30/2011	10:19:38 PM	SiCl4 post valve closed
5/30/2011	10:19:38 PM	Bubbler valve closed
5/30/2011	10:19:38 PM	Main Vac valve opened
5/30/2011	10:19:38 PM	Bypass valve opened
5/30/2011	10:19:38 PM	Helium MFC set to  0.000000
5/30/2011	10:19:38 PM	H2 MFC set to  0.000000
5/30/2011	10:19:38 PM	BCl3 MFC set to  0.000000
5/30/2011	10:19:38 PM	PHl3 MFC set to  0.000000
5/30/2011	10:19:38 PM	SiCl4 MFC set to  0.000000
5/30/2011	10:19:38 PM	Bypass solenoid MFC set to  0.000000
5/30/2011	10:19:39 PM	Tube furnace set to 0
5/30/2011	10:19:39 PM	Run finished at 10:19 PM
5/30/2011	10:19:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
